Product Features

RA420-48V-L is a high precision aligner that has the X-axis and Y-axis for the θ-axis and has the Z-axis mechanism for compensating the wafer position.

• Throughput is improved.
• High accuracy (Notch accuracy: ±0.05°, Center accuracy: ±0.05 mm).
• Handling of transparent glass and laminate wafers.

Main Specifications of the Product

Wafer size

Dia. 100mm to 200mm

Notch angle accuracy

±0.05 to ±0.1°　Changes according to the alignment mode.

Center accuracy

±0.05 to ±0.1mm　Changes according to the alignment mode.

Positioning time interval

2.5 to 6.5sec　Changes according to the alignment mode.

Power supply

24V DC 4A

Communication method

TCP/IP （RS-232C is also available as an option）

Product Dimensions (Standard Specifications)

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