PRODUCTSProduct Information
Wafer Handling System:Atmospheric Robot
RR756L15

Product Features
RR756 is a SCARA robot and all axes have stepping motors with absolute encoders.
The synchronous interpolation of the arm axis and rotation axis enables 2-port access without the X-axis track. The robot X-axis track can be added outside to perform the simultaneous control from the robot side including the teaching positions.
- Stepping servo motors with ABS encoders are mounted on all axes.
- 2-port access without X-axis track is available.
- Heavier hand can be equipped by increasing the arm rigidity.
- Control of the robot X-axis track is available.
Main Specifications of the Product
- Arm/Blade
- Single
- Arm length [mm]
- 156
- Z-axis stroke [mm]
- 340/410/450
- Max. transfer position [mm]
- R728 For 300mm wafer
- Rot. range [deg]
- 330
- Transfer accuracy [mm]
- ±0.1
- Cleanliness ISO-CLASS
- 1
- Rotation radius
- R245 to R282.5 Changes according to the wrist section and finger length.
- Encoder specification
- Absolute
Product Dimensions (Standard Specifications)
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