The model RV201-F07-N is a N2 bottom purge type load port.
Original nozzle mechanism is used for gas control by mass flow controller.
The door opening/closing mechanism of the standard model is inherited, opening/closing of the FOUP door is precisely controlled, and high level cleanliness performance is realized.
- Available for FOUP and Auto Door FOSB as a standard.
- High cleanliness performance is attained by the original door opening/closing mechanism and precise motion control.
- Low pressure loss filter is built in.
- Original nozzle is mounted.
Main Specifications of the Product
- Special specifications
- Available for purge and turn type
- Power supply
- DC24V±10%, 9A
- Compressed air
- 0.5MPa to 0.6MPa 10L/min or more
- -60kPa to -80kPa, 10L/min or more
Product Dimensions (RV201-F07-N)
- Info pad pin and lockout pin
- RF-ID/Bar code
- Customization of indication lamp
- Available for E84
- Available for External I/O
- RS232C communication specifications
- Temperature/humidity sensor
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