Product Features

The model RV201-F07-N is a N2 bottom purge type load port.
Original nozzle mechanism is used for gas control by mass flow controller.
The door opening/closing mechanism of the standard model is inherited, opening/closing of the FOUP door is precisely controlled, and high level cleanliness performance is realized.

• Available for FOUP and Auto Door FOSB as a standard.
• High cleanliness performance is attained by the original door opening/closing mechanism and precise motion control.
• Low pressure loss filter is built in.
• Original nozzle is mounted.

Main Specifications of the Product

Special specifications

Available for purge and turn type

Power supply

DC24V±10%, 9A

Compressed air

0.5MPa to 0.6MPa 10L/min or more

Vacuum

-60kPa to -80kPa, 10L/min or more

N2

Available

Product Dimensions (RV201-F07-N)

• 

Option

• Info pad pin and lockout pin
• RF-ID/Bar code
• Customization of indication lamp
• Available for E84
• Available for External I/O
• RS232C communication specifications
• Temperature/humidity sensor

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