Product Features

The load port model RV201-F07-C can handle FOUP, Auto Door FOSB, and 200 mm open cassette in one unit, and enables short time switching between the carriers.
The door opening/closing mechanism of the standard model is inherited, opening/closing of the FOUP door is precisely controlled, and high level cleanliness performance is realized.

• Available for FOUP and Auto Door FOSB as a standard.
• High cleanliness performance is attained by the original door opening/closing mechanism and precise motion control.
• Available for 200 mm open cassette using the stage adaptor.

Main Specifications of the Product

Special specifications

Available for open cassette

Power supply

DC24V±10% 6A

Compressed air

0.5MPa to 0.6MPa, 10L/min or more

Vacuum

-60kPa to -80kPa, 10L/min or more

N2

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Product Dimensions (RV201-F07-C)

• 

Option

• Info pad pin and lockout pin
• RF-ID/Bar code
• Customization of indication lamp
• Available for E84
• Available for External I/O
• RS232C communication specifications
• Available for 200mm/300mm wafers
• Available for glass substrates

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