The load port model RV201-F07-C can handle FOUP, Auto Door FOSB, and 200 mm open cassette in one unit, and enables short time switching between the carriers. The door opening/closing mechanism of the standard model is inherited, opening/closing of the FOUP door is precisely controlled, and high level cleanliness performance is realized.
- Available for FOUP and Auto Door FOSB as a standard.
- High cleanliness performance is attained by the original door opening/closing mechanism and precise motion control.
- Available for 200 mm open cassette using the stage adaptor.
Main Specifications of the Product
- Special specifications
- Available for open cassette
- Power supply
- DC24V±10% 6A
- Compressed air
- 0.5MPa to 0.6MPa, 10L/min or more
- -60kPa to -80kPa, 10L/min or more
Product Dimensions (RV201-F07-C)
- Info pad pin and lockout pin
- RF-ID/Bar code
- Customization of indication lamp
- Available for E84
- Available for External I/O
- RS232C communication specifications
- Available for 200mm/300mm wafers
- Available for glass substrates
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