PRODUCTSProduct Information

Wafer Handling System:Load Port



Product Features

The load port model RV201-F07-C can handle FOUP, Auto Door FOSB, and 200 mm open cassette in one unit, and enables short time switching between the carriers.
The door opening/closing mechanism of the standard model is inherited, opening/closing of the FOUP door is precisely controlled, and high level cleanliness performance is realized.

  • Available for FOUP and Auto Door FOSB as a standard.
  • High cleanliness performance is attained by the original door opening/closing mechanism and precise motion control.
  • Available for 200 mm open cassette using the stage adaptor.

Main Specifications of the Product

Special specifications
Available for open cassette
Power supply
DC24V±10% 6A
Compressed air
0.5MPa to 0.6MPa, 10L/min or more
-60kPa to -80kPa, 10L/min or more

Product Dimensions (RV201-F07-C)

  • image


  • Info pad pin and lockout pin
  • RF-ID/Bar code
  • Customization of indication lamp
  • Available for E84
  • Available for External I/O
  • RS232C communication specifications
  • Available for 200mm/300mm wafers
  • Available for glass substrates

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