Product Features

RSR160 clamps the reticle edge in a minimum range to transfer the reticle without settling particles, and is available for the next-generation EUV mask.

• Various carries can be handled by mounting RORZE POD opener.
• Available for handling of pellicle-coated reticles(by changing the robot hand).
• Settling particle is avoided using the air flow control based on the air flow analysis.

Main Specifications of the Product

Number of ports

3

Handling object

Photomask, EUV mask 6inches x 6inches (152±0.4mm, Thickness: 6.35mm±0.1mm)

Carrier

RSP-200, RSP-150, EUV POD

Power voltage

Single-phase 200V AC ±10%, 50/60Hz ±5%

Current consumption

4kVA (20A/200 V AC) Including FFU

Vacuum (source pressure)

–

Vacuum (flow rate)

–

Positive pressure (source pressure)

0.6MPa to 0.7MPa

Positive pressure (flow rate)

10L/min

N2 gas (source pressure)

–

N2 gas (flow rate)

–

Interlock

–

Product Dimensions (Standard Specifications)

• 

Option

• Reticle turntable
• Reticle flipper
• Reticle non-contact alignment
• Reticle QR code reader

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