Product Features

RR759 is a boomerang arm robot and all axes have stepping motors with absolute encoders.
The synchronous interpolation of the arm axis and rotation axis enables 2-port access without the X-axis track. The double arms exchange wafers in the shortest period of time to improve the transferring throughput.
The robot X-axis track can be added outside to perform the simultaneous control from the robot side including the teaching positions. Accessing to all directions without rotation dead angle is allowed.

• Stepping servo motors with ABS encoders are mounted on all axes.
• 2-port access without X-axis track is available.
• Heavier hand can be equipped by increasing the arm rigidity.
• Control of the robot X-axis track is available.
• Accessing to all directions without rotation dead angle is allowed.
• Long-reach transfer is available.
• In principle, RR759 is sold only as an integrated system products.

Main Specifications of the Product

Arm/Blade

Double

Arm length [mm]

270

Z-axis stroke [mm]

190/420/550

Max. transfer position [mm]

R962　For 300mm wafer

Rot. range [deg]

420

Transfer accuracy [mm]

±0.1

Cleanliness ISO-CLASS

1

Rotation radius

R320　Changes according to the wrist section and finger length.

Encoder specification

Absolute

Product Dimensions (Standard Specifications)

• 

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