PRODUCTSProduct Information

Wafer Handling System:Atmospheric Robot

RR757L15

image

Product Features

RR757 is a SCARA robot and all axes have stepping motors with absolute encoders. The synchronous interpolation of the arm axis and rotation axis enables 2-port access without the X-axis track. The double arms exchange wafers in the shortest period of time to improve the transfer throughput. The robot X-axis track can be added outside to perform the simultaneous control from the robot side including the teaching positions.

  • Stepping servo motors with ABS encoders are mounted on all axes.
  • 2-port access without X-axis track is available.
  • Heavier hand can be equipped by increasing the arm rigidity.
  • High throughput by double-arm specification.
  • Control of the robot X-axis track is available.

Main Specifications of the Product

Arm/Blade
Double
Arm length [mm]
156
Z-axis stroke [mm]
340/410/430
Max. transfer position [mm]
R766 For 300mm wafer
Rot. range [deg]
330
Transfer accuracy [mm]
±0.1
Cleanliness ISO-CLASS
1
Rotation radius
R282.5 to R335 Changes according to the wrist section and finger length.
Encoder specification
Absolute

Product Dimensions (Standard Specifications)

  • image

Materials

For inquiry on this product, please click on
this link

Page Top