Product Features

The RR491/frog leg arm vacuum robot realizes the high positioning repeatability and highly reliable vacuum partition performance by adopting DDM (vacuum direct drive motor) for the drive section. The full-link arm mechanism realizes the highly accurate positioning repeatability.

• High accuracy.
• Available for ultrahigh vacuum.
• High throughput.
• Available for the AWC option (wafer position compensation).

Main Specifications of the Product

Substrate size

Up to 300mm wafer, 6-inch mask, etc.

Transfer distance of substrate center

778mm (for 300mm wafer)

Z-axis stroke

70mm/140mm

Rotation range

Rotation not limited

Rotation diameter

810mm

Transfer accuracy (X,Y)

±0.1mm

Mass

65kg

Vacuum-proof level

10E-6 Pa

He leakage rate

5x10E-9 Pa.㎥/sec He (Base vacuum 5x10E-4 Pa)

Operating temperature

80℃ or less

Materials used in vacuum

Alminum, Stainless steel, AM350 (Bellows), Magnet with Ni plating spec., Fluorine-based O-ring

Motor specifications

Vacuum direct drive motor (Z-axis: Servo motor)

Encoder specifications

ABS

Utility

48V DC (motor drive), 24V DC (communication)

Communication specifications

TCP/IP

Option

Teaching pendant, Power unit (200V AC input)

Product Dimensions (Standard Specifications)

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