PRODUCTSProduct Information

Wafer Handling System:Atmospheric Robot

RR751L15

image

Product Features

RR751 is a SCARA robot and all axes have stepping motors with encoders. The double arms exchange wafers in the shortest period of time to improve the transferring throughput. The robot X-axis track can be added outside to perform the simultaneous control from the robot side including the teaching positions.

  • Stepping servo motors are mounted on all axes.
  • High throughput by double-arm specification.
  • Control of the robot X-axis track is available.

Main Specifications of the Product

Arm/Blade
Double
Arm length [mm]
156
Z-axis stroke [mm]
340/410
Max. transfer position [mm]
R766 For 300mm wafer
Rot. range [deg]
330
Transfer accuracy [mm]
±0.1
Cleanliness ISO-CLASS
1
Rotation radius
R282.5 to R335 Changes according to the wrist section and finger length.
Encoder specification
Incremental

Product Dimensions (Standard Specifications)

  • image

For request materials and inquiry about our products, click on
this link

Page Top