RA420-26V-L is a high precision aligner that has the X-axis and Y-axis for the θ-axis and has the Z-axis mechanism for compensating the wafer position.
- Throughput is improved.
- High accuracy (Notch accuracy: ±0.05°, Center accuracy: ±0.05 mm).
- Handling of transparent glass and laminate wafers.
Main Specifications of the Product
- Wafer size
- Dia. 2″ to 6″ (150 mm)
- Notch angle accuracy
- ±0.05 to ±0.1° Changes according to the alignment mode.
- Center accuracy
- ±0.05 to ±0.1mm Changes according to the alignment mode.
- Positioning time interval
- 2.5 to 6.5sec Changes according to the alignment mode.
- Power supply
- 24V DC 4A
- Communication method
Product Dimensions (Standard Specifications)
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