PRODUCTSProduct Information

Wafer Handling System:Aligner

RA420-26V-L

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Product Features

RA420-26V-L is a high precision aligner that has the X-axis and Y-axis for the θ-axis and has the Z-axis mechanism for compensating the wafer position.

  • Throughput is improved.
  • High accuracy (Notch accuracy: ±0.05°, Center accuracy: ±0.05 mm).
  • Handling of transparent glass and laminate wafers.

Main Specifications of the Product

Wafer size
Dia. 2″ to 6″ (150 mm)
Notch angle accuracy
±0.05 to ±0.1° Changes according to the alignment mode.
Center accuracy
±0.05 to ±0.1mm Changes according to the alignment mode.
Positioning time interval
2.5 to 6.5sec Changes according to the alignment mode.
Power supply
24V DC 4A
Communication method
TCP/IP

Product Dimensions (Standard Specifications)

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