Vacuum Platform
RV series
Features
Maximum Process Performance
●Optimum Concepts
1.Minimum footprint with the most effective transfer
dimensions
2.Great throughput by most effective transfer dimensions
3.Platform designed with a best-selected vacuum robot
●Various Options(coming soon!)
1.Auto-Teaching Function for simplified maintenance work
2.Wafer alignment function for correcting accumulated errors
made in Process Mudule
3.Wafer monitoring function for cracks and chips
4.Minienvironment monitoring function for periodical
maintenance and failure prevention
